Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors, 23(3):1276, February 2023. [doi]
@article{ChenFGJZPXHWW23, title = {A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy}, author = {Shuo Chen and Liuhaodong Feng and Song Guo and Yucheng Ji and Shuwen Zeng and Xinlin Peng and Yang Xu and Tianbao Hu and Zhenyu Wu and Shinan Wang}, year = {2023}, month = {February}, doi = {10.3390/s23031276}, url = {https://doi.org/10.3390/s23031276}, researchr = {https://researchr.org/publication/ChenFGJZPXHWW23}, cites = {0}, citedby = {0}, journal = {Sensors}, volume = {23}, number = {3}, pages = {1276}, }