Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors, 23(3):1276, February 2023. [doi]
Abstract is missing.