Petri-Net and GA Based Approach to Modeling, Scheduling, and Performance Evaluation for Wafer Fabrication

Jyh-Horng Chen, Li-Chen Fu, Ming-Hung Lin. Petri-Net and GA Based Approach to Modeling, Scheduling, and Performance Evaluation for Wafer Fabrication. In Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA. pages 3403-3408, IEEE, 2000.

Abstract

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