A MEMS based sensor for large scale force measurement

Weihai Chen, Jun Jiang, Jingmeng Liu, Wenjie Chen. A MEMS based sensor for large scale force measurement. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 1278-1283, IEEE, 2013. [doi]

@inproceedings{ChenJLC13,
  title = {A MEMS based sensor for large scale force measurement},
  author = {Weihai Chen and Jun Jiang and Jingmeng Liu and Wenjie Chen},
  year = {2013},
  doi = {10.1109/AIM.2013.6584270},
  url = {https://doi.org/10.1109/AIM.2013.6584270},
  researchr = {https://researchr.org/publication/ChenJLC13},
  cites = {0},
  citedby = {0},
  pages = {1278-1283},
  booktitle = {2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013},
  publisher = {IEEE},
  isbn = {978-1-4673-5319-9},
}