P. S. Chen, Y. W. Lee, D.-S. Huang, S. C. Chen, C. F. Cheng, J. H. Lee, Jun He. AC TDDB Analysis for HK/IL Gate Stack Breakdown and Frequency-dependent Oxygen Vacancy Trap Generation in Advanced nodes FinFET Devices by SILC Spectrum Methodology. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 11, IEEE, 2022. [doi]
Abstract is missing.