Modeling and Circuit Analysis of Interconnects with TaS2 Barrier/Liner

Xinkang Chen, Chun-Li Lo, Mark C. Johnson, Zhihong Chen, Sumeet Kumar Gupta. Modeling and Circuit Analysis of Interconnects with TaS2 Barrier/Liner. In Device Research Conference, DRC 2021, Santa Barbara, CA, USA, June 20-23, 2021. pages 1-2, IEEE, 2021. [doi]

@inproceedings{ChenLJCG21,
  title = {Modeling and Circuit Analysis of Interconnects with TaS2 Barrier/Liner},
  author = {Xinkang Chen and Chun-Li Lo and Mark C. Johnson and Zhihong Chen and Sumeet Kumar Gupta},
  year = {2021},
  doi = {10.1109/DRC52342.2021.9467160},
  url = {https://doi.org/10.1109/DRC52342.2021.9467160},
  researchr = {https://researchr.org/publication/ChenLJCG21},
  cites = {0},
  citedby = {0},
  pages = {1-2},
  booktitle = {Device Research Conference, DRC 2021, Santa Barbara, CA, USA, June 20-23, 2021},
  publisher = {IEEE},
  isbn = {978-1-6654-1240-7},
}