Semi-Supervised Framework for Wafer Defect Pattern Recognition with Enhanced Labeling

Leon Li-Yang Chen, Katherine Shu-Min Li, Xu-Hao Jiang, Sying-Jyan Wang, Andrew Yi-Ann Huang, Jwu E. Chen, Hsing-Chung Liang, Chun-Lung Hsu. Semi-Supervised Framework for Wafer Defect Pattern Recognition with Enhanced Labeling. In IEEE International Test Conference, ITC 2021, Anaheim, CA, USA, October 10-15, 2021. pages 208-212, IEEE, 2021. [doi]

Abstract

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