Intelligent control of Piezoelectric Micropump based on MEMS flow sensor

Liguo Chen, Yaxin Liu, Lining Sun, Dongsheng Qu, Jijiang Min. Intelligent control of Piezoelectric Micropump based on MEMS flow sensor. In 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 18-22, 2010, Taipei, Taiwan. pages 3055-3060, IEEE, 2010. [doi]

Abstract

Abstract is missing.