High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes - researchr publication authors

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Xuying Chen, Xinxin Liu, Tao Wang, Xianhao Le, Zhonggui Xu, Chengkuo Lee, Jin Xie. High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 212-215, IEEE, 2018. [doi]

This author has not been identified. Look up 'Xuying Chen' in GoogleThis author has not been identified. Look up 'Xinxin Liu' in GoogleThis author has not been identified. Look up 'Tao Wang' in GoogleThis author has not been identified. Look up 'Xianhao Le' in GoogleThis author has not been identified. Look up 'Zhonggui Xu' in GoogleThis author has not been identified. Look up 'Chengkuo Lee' in GoogleThis author has not been identified. Look up 'Jin Xie' in Google

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