Xuying Chen, Xinxin Liu, Tao Wang, Xianhao Le, Zhonggui Xu, Chengkuo Lee, Jin Xie. High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 212-215, IEEE, 2018. [doi]
Abstract is missing.