Xuying Chen, Xinxin Liu, Tao Wang, Xianhao Le, Zhonggui Xu, Chengkuo Lee, Jin Xie. High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 212-215, IEEE, 2018. [doi]
@inproceedings{ChenLWLXLX18,
title = {High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes},
author = {Xuying Chen and Xinxin Liu and Tao Wang and Xianhao Le and Zhonggui Xu and Chengkuo Lee and Jin Xie},
year = {2018},
doi = {10.1109/NEMS.2018.8557015},
url = {https://doi.org/10.1109/NEMS.2018.8557015},
researchr = {https://researchr.org/publication/ChenLWLXLX18},
cites = {0},
citedby = {0},
pages = {212-215},
booktitle = {13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018},
publisher = {IEEE},
isbn = {978-1-5386-5273-2},
}