High precision adaptive control for piezo-actuated stage

Xinkai Chen, Toshikuni Ozaki. High precision adaptive control for piezo-actuated stage. In 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010, Tianjin, China, December 14-18, 2010. pages 1440-1445, IEEE, 2010. [doi]

Abstract

Abstract is missing.