Sinusoidal trajectory for atomic force microscopy precision local scanning with auxiliary optical microscopy

Chih-Lieh Chen, Jim-Wei Wu, Yi-Ting Lin, Yu-Ting Lo, Li-Chen Fu. Sinusoidal trajectory for atomic force microscopy precision local scanning with auxiliary optical microscopy. In Proceedings of the 52nd IEEE Conference on Decision and Control, CDC 2013, December 10-13, 2013, Firenze, Italy. pages 348-353, IEEE, 2013. [doi]

Authors

Chih-Lieh Chen

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Jim-Wei Wu

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Yi-Ting Lin

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Yu-Ting Lo

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Li-Chen Fu

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