Sinusoidal trajectory for atomic force microscopy precision local scanning with auxiliary optical microscopy

Chih-Lieh Chen, Jim-Wei Wu, Yi-Ting Lin, Yu-Ting Lo, Li-Chen Fu. Sinusoidal trajectory for atomic force microscopy precision local scanning with auxiliary optical microscopy. In Proceedings of the 52nd IEEE Conference on Decision and Control, CDC 2013, December 10-13, 2013, Firenze, Italy. pages 348-353, IEEE, 2013. [doi]

Abstract

Abstract is missing.