A feedforward neural networks (FNN) used for semiconductor wafer fabrication parameters optimization - researchr publication authors

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Yongmei Chen, Xiangdong Wang, Shoujue Wang, Linchu Shi. A feedforward neural networks (FNN) used for semiconductor wafer fabrication parameters optimization. In International Joint Conference Neural Networks, IJCNN 1999, Washington, DC, USA, July 10-16, 1999. pages 3922-3926, IEEE, 1999. [doi]

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