A feedforward neural networks (FNN) used for semiconductor wafer fabrication parameters optimization

Yongmei Chen, Xiangdong Wang, Shoujue Wang, Linchu Shi. A feedforward neural networks (FNN) used for semiconductor wafer fabrication parameters optimization. In International Joint Conference Neural Networks, IJCNN 1999, Washington, DC, USA, July 10-16, 1999. pages 3922-3926, IEEE, 1999. [doi]

@inproceedings{ChenWWS99,
  title = {A feedforward neural networks (FNN) used for semiconductor wafer fabrication parameters optimization},
  author = {Yongmei Chen and Xiangdong Wang and Shoujue Wang and Linchu Shi},
  year = {1999},
  doi = {10.1109/IJCNN.1999.830783},
  url = {https://doi.org/10.1109/IJCNN.1999.830783},
  researchr = {https://researchr.org/publication/ChenWWS99},
  cites = {0},
  citedby = {0},
  pages = {3922-3926},
  booktitle = {International Joint Conference Neural Networks, IJCNN 1999, Washington, DC, USA, July 10-16, 1999},
  publisher = {IEEE},
}