Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Da Chen, Jingjing Wang, Dong Xu, Yafei Zhang. The influence of the AlN film texture on the wet chemical etching. Microelectronics Journal, 40(1):15-19, 2009. [doi]
Abstract is missing.