Gate leakage properties of MOS devices with tri-layer high-k gate dielectric

W. B. Chen, J. P. Xu, P. T. Lai, Y. P. Li, S. G. Xu. Gate leakage properties of MOS devices with tri-layer high-k gate dielectric. Microelectronics Reliability, 47(6):937-943, 2007. [doi]

@article{ChenXLLX07,
  title = {Gate leakage properties of MOS devices with tri-layer high-k gate dielectric},
  author = {W. B. Chen and J. P. Xu and P. T. Lai and Y. P. Li and S. G. Xu},
  year = {2007},
  doi = {10.1016/j.microrel.2006.06.002},
  url = {http://dx.doi.org/10.1016/j.microrel.2006.06.002},
  researchr = {https://researchr.org/publication/ChenXLLX07},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {47},
  number = {6},
  pages = {937-943},
}