Assembly of a CNT-FET based on nanorobotic manipulation system inside a SEM

Zhichao Chen, Zhan Yang, Tao Chen, Lining Sun. Assembly of a CNT-FET based on nanorobotic manipulation system inside a SEM. In 2016 International Conference on Advanced Robotics and Mechatronics, ICARM 2016, Macau, China, August 18-20, 2016. pages 231-236, IEEE, 2016. [doi]

Authors

Zhichao Chen

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Zhan Yang

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Tao Chen

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Lining Sun

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