Assembly of a CNT-FET based on nanorobotic manipulation system inside a SEM

Zhichao Chen, Zhan Yang, Tao Chen, Lining Sun. Assembly of a CNT-FET based on nanorobotic manipulation system inside a SEM. In 2016 International Conference on Advanced Robotics and Mechatronics, ICARM 2016, Macau, China, August 18-20, 2016. pages 231-236, IEEE, 2016. [doi]

@inproceedings{ChenYCS16-0,
  title = {Assembly of a CNT-FET based on nanorobotic manipulation system inside a SEM},
  author = {Zhichao Chen and Zhan Yang and Tao Chen and Lining Sun},
  year = {2016},
  doi = {10.1109/ICARM.2016.7606924},
  url = {https://doi.org/10.1109/ICARM.2016.7606924},
  researchr = {https://researchr.org/publication/ChenYCS16-0},
  cites = {0},
  citedby = {0},
  pages = {231-236},
  booktitle = {2016 International Conference on Advanced Robotics and Mechatronics, ICARM 2016, Macau, China, August 18-20, 2016},
  publisher = {IEEE},
  isbn = {978-1-5090-3364-5},
}