Wafer map failure pattern recognition based on deep convolutional neural network

Shouhong Chen, Yuxuan Zhang, Xingna Hou, Yuling Shang, Ping Yang. Wafer map failure pattern recognition based on deep convolutional neural network. Expert Syst. Appl., 209:118254, 2022. [doi]

Authors

Shouhong Chen

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Yuxuan Zhang

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Xingna Hou

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Yuling Shang

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Ping Yang

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