Wafer map failure pattern recognition based on deep convolutional neural network

Shouhong Chen, Yuxuan Zhang, Xingna Hou, Yuling Shang, Ping Yang. Wafer map failure pattern recognition based on deep convolutional neural network. Expert Syst. Appl., 209:118254, 2022. [doi]

@article{ChenZHSY22,
  title = {Wafer map failure pattern recognition based on deep convolutional neural network},
  author = {Shouhong Chen and Yuxuan Zhang and Xingna Hou and Yuling Shang and Ping Yang},
  year = {2022},
  doi = {10.1016/j.eswa.2022.118254},
  url = {https://doi.org/10.1016/j.eswa.2022.118254},
  researchr = {https://researchr.org/publication/ChenZHSY22},
  cites = {0},
  citedby = {0},
  journal = {Expert Syst. Appl.},
  volume = {209},
  pages = {118254},
}