Yaqiong Chen, Zhenhai Zhang, Yantao Shen, Kejie Li. Wafer-level test system using a physical stimulus for a MEMS accelerometer. In 2017 IEEE International Conference on Real-time Computing and Robotics, RCAR 2017, Okinawa, Japan, July 14-18, 2017. pages 145-150, IEEE, 2017. [doi]
Abstract is missing.