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Method for Evaluating Reliance Level of a Virtual Metrology System

Fan-Tien Cheng, Yeh-Tung Chen, Yu-Chuan Su, Deng-Lin Zeng. Method for Evaluating Reliance Level of a Virtual Metrology System. In 2007 IEEE International Conference on Robotics and Automation, ICRA 2007, 10-14 April 2007, Roma, Italy. pages 1590-1596, IEEE, 2007. [doi]

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Fan-Tien Cheng

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Yeh-Tung Chen

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Yu-Chuan Su

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Deng-Lin Zeng

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