Wafer Defect Pattern Classification with Explainable-Decision Tree Technique

Ken Chau-Cheung Cheng, Katherine Shu-Min Li, Sying-Jyan Wang, Andrew Yi-Ann Huang, Chen-Shiun Lee, Leon Li-Yang Chen, Peter Yi-Yu Liao, Nova Cheng-Yen Tsai. Wafer Defect Pattern Classification with Explainable-Decision Tree Technique. In IEEE International Test Conference, ITC 2022, Anaheim, CA, USA, September 23-30, 2022. pages 549-553, IEEE, 2022. [doi]

Authors

Ken Chau-Cheung Cheng

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Katherine Shu-Min Li

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Sying-Jyan Wang

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Andrew Yi-Ann Huang

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Chen-Shiun Lee

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Leon Li-Yang Chen

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Peter Yi-Yu Liao

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Nova Cheng-Yen Tsai

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