Ken Chau-Cheung Cheng, Katherine Shu-Min Li, Sying-Jyan Wang, Andrew Yi-Ann Huang, Chen-Shiun Lee, Leon Li-Yang Chen, Peter Yi-Yu Liao, Nova Cheng-Yen Tsai. Wafer Defect Pattern Classification with Explainable-Decision Tree Technique. In IEEE International Test Conference, ITC 2022, Anaheim, CA, USA, September 23-30, 2022. pages 549-553, IEEE, 2022. [doi]
Abstract is missing.