Fan-Tien Cheng, Haw Ching Yang, Chia-Ying Tsai. Development of a Service Management Scheme for Semiconductor Factory Management Systems. In Proceedings of the 2002 IEEE International Conference on Robotics and Automation, ICRA 2002, May 11-15, 2002, Washington, DC, USA. pages 3607-3612, IEEE, 2002.
Abstract is missing.