Haitao Cheng, Heng Yang, Yuelin Wang. Fabrication of nanobeam using Focused ion beam (FIB) and KOH etching. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 139-142, IEEE, 2009. [doi]
Abstract is missing.