Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System

George Cheroff, Frank F. Fang, Frederick Hochberg. Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System. IBM Journal of Research and Development, 8(4):416-421, 1964. [doi]

Abstract

Abstract is missing.