Emmanuel Chery, Lucie Sourgen, Jacopo Franco, Mihaela Ioana Popovici, Eric Beyne. Reliability Study of La- and Al-Doped ZrO2 Dielectrics for High Density MIMCAP Applications. In IEEE International Reliability Physics Symposium, IRPS 2025, Monterey, CA, USA, March 30 - April 3, 2025. pages 1-7, IEEE, 2025. [doi]
Abstract is missing.