Hui-Ju Katherine Chiang, Chi-Yuan Liu, Jie-Hong R. Jiang, Yao-Wen Chang. Simultaneous EUV Flare Variation Minimization and CMP Control by Coupling-Aware Dummification. IEEE Trans. on CAD of Integrated Circuits and Systems, 35(4):598-610, 2016. [doi]
Abstract is missing.