A Cell-Based Row-Structure Layout Decomposer for Triple Patterning Lithography

Hsi-An Chien, Szu-Yuan Han, Ye Hong Chen, Ting-Chi Wang. A Cell-Based Row-Structure Layout Decomposer for Triple Patterning Lithography. In Azadeh Davoodi, Evangeline Young, editors, Proceedings of the 2015 Symposium on International Symposium on Physical Design, ISPD 2015, Monterey, CA, USA, March 29 - April 01, 2015. pages 67-74, ACM, 2015. [doi]

Abstract

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