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2 layers using dynamic measurement protocols

Philippe Chiquet, Pascal Masson, Romain Laffont, Gilles Micolau, Jérémy Postel-Pellerin, Frédéric Lalande, Bernard Bouteille, Jean-Luc Ogier. 2 layers using dynamic measurement protocols. Microelectronics Reliability, 52(9-10):1895-1900, 2012. [doi]

Authors

Philippe Chiquet

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Pascal Masson

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Romain Laffont

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Gilles Micolau

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Jérémy Postel-Pellerin

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Frédéric Lalande

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Bernard Bouteille

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Jean-Luc Ogier

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