2 layers using dynamic measurement protocols

Philippe Chiquet, Pascal Masson, Romain Laffont, Gilles Micolau, Jérémy Postel-Pellerin, Frédéric Lalande, Bernard Bouteille, Jean-Luc Ogier. 2 layers using dynamic measurement protocols. Microelectronics Reliability, 52(9-10):1895-1900, 2012. [doi]

Abstract

Abstract is missing.