ELIAD: Efficient Lithography Aware Detailed Routing Algorithm With Compact and Macro Post-OPC Printability Prediction

Minsik Cho, Kun Yuan, Yongchan Ban, David Z. Pan. ELIAD: Efficient Lithography Aware Detailed Routing Algorithm With Compact and Macro Post-OPC Printability Prediction. IEEE Trans. on CAD of Integrated Circuits and Systems, 28(7):1006-1016, 2009. [doi]

Abstract

Abstract is missing.