Machine Learning Assisted Statistical Variation Analysis of Ferroelectric Transistors: From Experimental Metrology to Predictive Modeling

Gihun Choe, Prasanna Venkatesan Ravindran, Anni Lu, Jae Hur, Maximilian Lederer, André Reck, Sarah Lombardo, Nashrah Afroze, Josh Kacher, Asif Islam Khan, Shimeng Yu. Machine Learning Assisted Statistical Variation Analysis of Ferroelectric Transistors: From Experimental Metrology to Predictive Modeling. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 336-337, IEEE, 2022. [doi]

Abstract

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