Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films

A-Ram Choi, Sang-Sik Choi, Byung-Guan Park, Dongwoo Suh, Gyungock Kim, Jin Tae Kim, Jin Soo Choi, Deok Ho Cho, Tae-Hyun Han, Kyu-Hwan Shim. Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films. IEICE Transactions, 91-C(5):767-771, 2008. [doi]

Authors

A-Ram Choi

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Sang-Sik Choi

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Byung-Guan Park

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Dongwoo Suh

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Gyungock Kim

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Jin Tae Kim

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Jin Soo Choi

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Deok Ho Cho

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Tae-Hyun Han

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Kyu-Hwan Shim

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