Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films

A-Ram Choi, Sang-Sik Choi, Byung-Guan Park, Dongwoo Suh, Gyungock Kim, Jin Tae Kim, Jin Soo Choi, Deok Ho Cho, Tae-Hyun Han, Kyu-Hwan Shim. Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films. IEICE Transactions, 91-C(5):767-771, 2008. [doi]

@article{ChoiCPSKKCCHS08,
  title = {Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films},
  author = {A-Ram Choi and Sang-Sik Choi and Byung-Guan Park and Dongwoo Suh and Gyungock Kim and Jin Tae Kim and Jin Soo Choi and Deok Ho Cho and Tae-Hyun Han and Kyu-Hwan Shim},
  year = {2008},
  doi = {10.1093/ietele/e91-c.5.767},
  url = {http://dx.doi.org/10.1093/ietele/e91-c.5.767},
  researchr = {https://researchr.org/publication/ChoiCPSKKCCHS08},
  cites = {0},
  citedby = {0},
  journal = {IEICE Transactions},
  volume = {91-C},
  number = {5},
  pages = {767-771},
}