Development of Laser-Assisted Bonding with Compression (LABC) Process for 3D IC Integration

Kwang-Seong Choi, Yong-Sung Eom, Seok Hwan Moon, Jiho Joo, Kwangjoo Lee, Jung Hak Kim, Ju Hyeon Kim. Development of Laser-Assisted Bonding with Compression (LABC) Process for 3D IC Integration. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-3, IEEE, 2019. [doi]

@inproceedings{ChoiEMJLKK19,
  title = {Development of Laser-Assisted Bonding with Compression (LABC) Process for 3D IC Integration},
  author = {Kwang-Seong Choi and Yong-Sung Eom and Seok Hwan Moon and Jiho Joo and Kwangjoo Lee and Jung Hak Kim and Ju Hyeon Kim},
  year = {2019},
  doi = {10.1109/3DIC48104.2019.9058890},
  url = {https://doi.org/10.1109/3DIC48104.2019.9058890},
  researchr = {https://researchr.org/publication/ChoiEMJLKK19},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019},
  publisher = {IEEE},
  isbn = {978-1-7281-4870-0},
}