Meng-Hao Chou, Ching-Chi Huang, Yi-Lin Liu, Huang-Chih Chen, Li-Chen Fu. Novel Micro Scanning with Integrated Atomic Force Microscope and Confocal Laser Scanning Microscope. In 2019 IEEE Conference on Control Technology and Applications, CCTA 2019, Hong Kong, SAR, China, August 19-21, 2019. pages 870-875, IEEE, 2019. [doi]
Abstract is missing.