Nonlinear Effects in MEMS Capacitive Microphone Design

Sazzadur Chowdhury, Majid Ahmadi, William C. Miller. Nonlinear Effects in MEMS Capacitive Microphone Design. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 297-302, IEEE Computer Society, 2003. [doi]

@inproceedings{ChowdhuryAM03:0,
  title = {Nonlinear Effects in MEMS Capacitive Microphone Design},
  author = {Sazzadur Chowdhury and Majid Ahmadi and William C. Miller},
  year = {2003},
  url = {http://csdl.computer.org/comp/proceedings/icmens/2003/1947/00/19470297abs.htm},
  tags = {C++, design},
  researchr = {https://researchr.org/publication/ChowdhuryAM03%3A0},
  cites = {0},
  citedby = {0},
  pages = {297-302},
  booktitle = {2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada},
  publisher = {IEEE Computer Society},
  isbn = {0-7695-1947-4},
}