Nonlinear Effects in MEMS Capacitive Microphone Design

Sazzadur Chowdhury, Majid Ahmadi, William C. Miller. Nonlinear Effects in MEMS Capacitive Microphone Design. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 297-302, IEEE Computer Society, 2003. [doi]

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