Sazzadur Chowdhury, Majid Ahmadi, William C. Miller. Nonlinear Effects in MEMS Capacitive Microphone Design. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 297-302, IEEE Computer Society, 2003. [doi]
Abstract is missing.