Hsiao-Yeh Chu, Ming-Hang Weng, Ru-Yuan Yang, Chien-Wei Huang, Chia-Hsing Li. Effect of Al thickness on the Al induced low temperature poly-si film crystallization process. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 641-644, IEEE, 2009. [doi]
Abstract is missing.