Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims

C. K. Chung, J. J. Jhu. Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 783-786, IEEE, 2009. [doi]

Abstract

Abstract is missing.