Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov. Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. Microelectronics Reliability, 52(9-10):2139-2143, 2012. [doi]

Authors

Mauro Ciappa

This author has not been identified. Look up 'Mauro Ciappa' in Google

Emre Ilgünsatiroglu

This author has not been identified. Look up 'Emre Ilgünsatiroglu' in Google

Alexey Yu. Illarionov

This author has not been identified. Look up 'Alexey Yu. Illarionov' in Google