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Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov. Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. Microelectronics Reliability, 52(9-10):2139-2143, 2012. [doi]

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