Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov. Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. Microelectronics Reliability, 52(9-10):2139-2143, 2012. [doi]
@article{CiappaII12, title = {Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies}, author = {Mauro Ciappa and Emre Ilgünsatiroglu and Alexey Yu. Illarionov}, year = {2012}, doi = {10.1016/j.microrel.2012.06.091}, url = {http://dx.doi.org/10.1016/j.microrel.2012.06.091}, researchr = {https://researchr.org/publication/CiappaII12}, cites = {0}, citedby = {0}, journal = {Microelectronics Reliability}, volume = {52}, number = {9-10}, pages = {2139-2143}, }