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On the Use of Neural Networks to Solve the Reverse Modelling Problem for the Quantification of Dopant Profiles Extracted by Scanning Probe Microscopy Techniques

Mauro Ciappa, Maria Stangoni, Wolfgang Fichtner, Elisa Ricci, Andrea Scorzoni. On the Use of Neural Networks to Solve the Reverse Modelling Problem for the Quantification of Dopant Profiles Extracted by Scanning Probe Microscopy Techniques. Microelectronics Reliability, 44(9-11):1703-1708, 2004. [doi]

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