Shape behavior analysis of a PMN-PT [001] actuated MOEMS micro-mirror

Dragos Adrian Ciubotariu, Cédric Clévy, Ioan Alexandru Ivan, Philippe Lutz. Shape behavior analysis of a PMN-PT [001] actuated MOEMS micro-mirror. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2015, Busan, South Korea, July 7-11, 2015. pages 453-458, IEEE, 2015. [doi]

Abstract

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